Aston

The Molecular Sensor For Semiconductor Metrology

Aston Leadership in Lifetime, Accuracy & Stability

Aston represents a major evolution in metrology for semiconductor processes. Built from the ground up as a robust molecular sensor for the semiconductor industry, Aston is resistant to corrosive gases, excessive particle deposition and gaseous contaminant condensation and works with or without a plasma present.

01

Realtime in-situ metrology

Aston’s In-situ data is rich, quantified, specific and actionable molecular data in real time, unlike in-line data taken after processing. In-Situ data allows tighter process control in-the-moment to provide greater (SPC) margin and line yield. 

02

Autonomous but Connected

Connect from anywhere in the Enterprise to securely control Aston and access molecular data through our AtonLab cloud based software or via the high speed API for your own or third party applications.

03

Actionable

One of the fundamental changes needed to optimize FAB management is the switch from in-line to in-situ metrology solutions.  Data has to be immediately actionable to provide tight control loops on process equipment.  It’s less about ‘big data’ and more about ‘useful data’ - that’s where Aston delivers.

04

Comprehensive

One tool supports the broadest class of semiconductor metrology  needs:

  • Chamber Management 
  • ML/AI
  • Small open are and HAR etch 
  • Technology Transfer 
  • CVD, ALD, ALE, Metal Etch
  • Selective Processing
  • Gate-all-around & 3D-NAND

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

Applications

Building on our break through technologies for sensing and understanding molecular information, our team of experts is innovating new solutions across the life sciences, semiconductor manufacturing, and industrial process control. 

Chamber Cleaning, Seasoning, Fingerprinting & Matching

Chamber Cleaning, Seasoning, Fingerprinting & Matching

Chamber clean end point detection, fingerprinting & seasoning (matching) within <1σ of a golden chamber

Accurate reactant partial pressures for CVD/ALD/ALE; critical for copy exact process duplication

Quantify contamination, gas impurities & chemistry inside the process chamber with ppb sensitivity


ML/AI & EPCO

Machine learning in semiconductor FABs is a multi $B efficiency opportunity.

Tighter process control gives higher line and product yield, higher throughput, and optimized maintenance schedules

Aston’s  measured in-situ real-time data at the molecular level gives true insight and is quantified, actionable data for ML models


Small Open Area and HAR Etch

Aston delivers metrology requirements for HAR etch, small OA% and selective processing for gate all around and 3D memory structures.  

High sensitivity for low Open Area (OA), 0.3%, and High  Aspect Ratio (HAR)

No plasma or pulsed plasma?  No problem! 

Metrology of structures beyond line-of-sight


Technology transfer

CopyExactly! has matured.   
Equipment and Process Co-Optimization (EPCO)  requires molecular level fingerprinting, profiling and matching; not just the same recipe on the same equipment. 
Tightly controlled, autonomous low level process and chamber management is the new gold standard, to exactly match the transfer source with molecular precision.

Black Arrow Carrot
Black Arrow Carrot

$38B long-term manufacturing optimization opportunity for Equipment and Process Co-Optimization (EPCO) in semiconductor manufacturing using in machine learning and artificial intelligence.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

What’s a Rich Text element?

The rich text element allows you to create and format headings, paragraphs, blockquotes, images, and video all in one place instead of having to add and format them individually. Just double-click and easily create content.

Static and dynamic content editing

A rich text element can be used with static or dynamic content. For static content, just drop it into any page and begin editing. For dynamic content, add a rich text field to any collection and then connect a rich text element to that field in the settings panel. Voila!

How to customize formatting for each rich text

Headings, paragraphs, blockquotes, figures, images, and figure captions can all be styled after a class is added to the rich text element using the "When inside of" nested selector system.

There are many different ways a business can display customer testimonials — And when determining the best approach...

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Marketing Lead, Twitter

There are many different ways a business can display customer testimonials — And when determining the best approach...

Sam Kennedy

Marketing Lead, Twitter

There are many different ways a business can display customer testimonials — And when determining the best approach...

Sam Kennedy

Marketing Lead, Twitter
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