Semiconductors

A Breakthrough in Semiconductor Manufacturing

Next generation digital molecular sensing capabilities purpose fit for process control

Traditional methods of metrology are insufficient for advanced semiconductor manufacturing. Optical Emission Spectroscopy (OES) methods lack the precision needed, and traditional Residual Gas Analysis (RGA) lack the durability to withstand the harsh, corrosive gas environments required by advanced semiconductor manufacturing processes. 

With Atonarp’s robust miniature mass spectrometer and proprietary software platform we’ve created a unique solution. We deliver accurate in-situ measurements, all within small, self-contained instruments, which are purpose built to withstand the rigors of advanced semiconductor manufacturing environments.

Rugged, Real-time, and Integration Ready

Digital molecular analysis takes metrology for semiconductor manufacturing to the next level

Built to Last

Our semiconductor metrology products prioritize durability, with innovations to protect against damage to the sensors, and unique cleaning processes that can remove particulate buildup on the sensor which can negatively affect sensitivity.

Integration Ready

Designed with ease of integration in mind, our products are plug and play ready. Their small footprint, combined with built in high-speed interfaces complete with a variety of industry standard protocol options, ensure the ability to fully integrate into any process tool or equipment control system.

Real-Time Information

Cloud connected and powered by innovative electronics and signal processing technology, our products provide high speed, high resolution measurements --providing actionable process insights.

Rugged, Real-time, and Integration Ready

Digital molecular analysis takes metrology for semiconductor manufacturing to the next level

Built to Last

Our semiconductor metrology products prioritize durability, with innovations to protect against damage to the sensors, and unique cleaning processes that can remove particulate buildup on the sensor which can negatively affect sensitivity.

Integration Ready

Designed with ease of integration in mind, our products are plug and play ready. Their small footprint, combined with built in high-speed interfaces complete with a variety of industry standard protocol options, ensure the ability to fully integrate into any process tool or equipment control system.

Real-Time Information

Cloud connected and powered by innovative electronics and signal processing technology, our products provide high speed, high resolution measurements --providing actionable process insights.

Our Products

Building on our break through technologies for sensing and understanding molecular information, our team of experts is innovating new solutions across the life sciences, semiconductor manufacturing, and industrial process control. 

Aston

Aston Machine

Real-time process control for semiconductor applications allows CVD, ALD, Etch, ALE and chamber matching in high volume manufacturing environments.

AMS-1000

Photo of the AMS-1000 machine

Measure precise quantities of gases no matter how small to optimize industrial process control and immediately detect any harmful contaminants.

LyoSentinel

Photo of the LyoSentinel Machine

A quantitative, real-time, sensor and silicon oil protection module for lyophilization (Lyo) improves process control and contaminant detection. 

Black Arrow Carrot
Black Arrow Carrot
Photo of the Aton-360

ATON-360

Atonarp’s revolutionary optical spectroscopy platform for molecular diagnostics. 

Applications

Building on our break through technologies for sensing and understanding molecular information, our team of experts is innovating new solutions across the life sciences, semiconductor manufacturing, and industrial process control. 

Chamber Cleaning, Seasoning, Fingerprinting & Matching

Chamber Cleaning, Seasoning, Fingerprinting & Matching

Chamber clean end point detection, fingerprinting & seasoning (matching) within <1σ of a golden chamber

Accurate reactant partial pressures for CVD/ALD/ALE; critical for copy exact process duplication

Quantify contamination, gas impurities & chemistry inside the process chamber with ppb sensitivity

ML/AI & EPCO

Machine learning in semiconductor FABs is a multi $B efficiency opportunity.

Tighter process control gives higher line and product yield, higher throughput, and optimized maintenance schedules

Aston’s  measured in-situ real-time data at the molecular level gives true insight and is quantified, actionable data for ML models

Small Open Area and HAR Eetch

Aston delivers metrology requirements for HAR etch, small OA% and selective processing for gate all around and 3D memory structures.  

High sensitivity for low Open Area (OA), 0.3%, and High  Aspect Ratio (HAR)

No plasma or pulsed plasma?  No problem! 

Metrology of structures beyond line-of-sight

Technology transfer

CopyExactly! has matured.   
Equipment and Process Co-Optimization (EPCO)  requires molecular level fingerprinting, profiling and matching; not just the same recipe on the same equipment. 
Tightly controlled, autonomous low level process and chamber management is the new gold standard, to exactly match the transfer source with molecular precision.

Black Arrow Carrot
Black Arrow Carrot
Aton-360

Aston

Real-time process control for semiconductor applications allows CVD, ALD, Etch, ALE and chamber matching in high volume manufacturing environments. Resistant to corrosive gases, contamination, and equipped with incredibly fine sensitivity, Aston is uniquely suited for real-time process control for semiconductor applications.

Photo of the AMS-1000 machine

AMS-1000

The industry’s first ever quantitative, real-time miniature molecular sensor allows you to monitor incredibly minuscule traces of gas. The AMS-1000 is equipped to operate in high-pressure environments without the need for external pumps making it well suited for select semiconductor process control applications.

Photo of the LyoSentinel Machine

LyoSentinel

A quantitative, real-time, sensor and silicon oil protection module for lyophilization (Lyo) improves process control and contaminant detection.

Photo of the AMS-1000 machine

AMS-1000

Measure precise quantities of gases no matter how small to optimize industrial process control and immediately detect any harmful contaminants.

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