Unlocking Molecular Insights


Atonarp is advancing semiconductor metrology, industrial process control, and life science research through digital molecular profiling.

We are innovating next-generation mass spectrometry and optical spectroscopy platforms. Both platforms offer specialized instruments tailored to solve molecular sensing and analysis needs across a wide range of industries.

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Semiconductor Process Control

ASTON Impact and ASTON Plasma are robust, high speed, high-sensitivity mass spectrometers that can withstand the harsh, corrosive gas environments required for advanced semiconductor in-situ process control. They deliver actionable, quantitative data needed to optimize processes and improve yield.

Select Application Areas:

  • Atomic Layer Deposition (ALD) :
    Speed with sensitivity to optimize throughput and safety management
  • Etch / ALE endpoint
    Sensitivity for dielectric and metal etch endpoint detection to 0.3% Open Area (OA)
  • Chamber management
    Clean endpoints, safety, chamber matching, and profiling
  • Sub FAB management
    Baseline/POR comparison with 1% variation
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Pharmaceutical Manufacturing

ASTON LyoSentinel is an advanced mass spectrometer solution for lyophilization, specialty coating, and surface treatments. Sampling is protected by the inlet filtration system, while sensitivity to detect contaminants is preserved. It is durable, accurate, cost-effective, and easy to use.

Application Areas:

  • Measures residual water endpoints to optimize cake formation and drying endpoint in the lyophilization process
  • Detects trace KT5/silicone oil contamination to minimize yield loss
  • Detects in-line vacuum leaks to reduce time to “production-ready” for the next batch.
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Life Sciences

The ATON multi-laser optical spectroscopy platform can be used in a variety of applications to advance life science research.

  • Cell-based assays
  • Spatial biology
  • Liquid biopsy
  • Non-invasive glucose testing
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