Fast, High Sensitivity Mass Spectrometers for in-situ Metrology
The ASTON platform includes a portfolio of fast, high-sensitivity mass spectrometers with proprietary software that enable quantitative, rapid gas analysis required in complex in-situ semiconductor manufacturing processes. The ASTON platform delivers real-time, chemically specific actionable insights to maximize throughput and yield. One tool can replace multiple legacy tools.
The ASTON Platform supports the broad metrology needs, including the precise in-situ process management required in today’s industry.
Aston is up to 20x more sensitive in detecting end point in high-speed sampling applications. This is especially important when measuring low concentration byproduct gases, where signal to noise ratio is critical to informing process decisions.