Fast, High Sensitivity Mass Spectrometers for in-situ Metrology
The ASTON platform includes a portfolio of fast, high-sensitivity mass spectrometers with proprietary software that enable quantitative, rapid gas analysis required in complex in-situ semiconductor manufacturing processes. The ASTON platform delivers real-time, chemically specific actionable insights to maximize throughput and yield. One tool can replace multiple legacy tools.
The ASTON Platform supports the broad metrology needs, including the precise in-situ process management required in today’s industry.