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ElectroPages | Innovative new metrology platform for semiconductor manufacturing processes

Published on
July 20, 2021
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Atonarp has announced Aston, an innovative in-situ semiconductor metrology platform with an integrated plasma ionisation source.

It is a major evolution in metrology for semiconductor production processes, facilitating in-situ molecular process control and enabling existing fabs to run more efficiently, pushing higher output. Developed from the ground up for semiconductor production, it is a robust platform that can supplant multiple legacy tools and offer unprecedented levels of control over a complete set of applications, including lithography, dielectric and conductive etch and deposition, chamber matching, chamber clean, and abatement.