All Posts
All Behind the Spec
This is some text inside of a div block.
News Article

ElectroPages | Innovative new metrology platform for semiconductor manufacturing processes

Published on
July 20, 2021
Subscribe to newsletter
By subscribing you agree to with our Privacy Policy.
Thank you! Your submission has been received!
Oops! Something went wrong while submitting the form.

Atonarp has announced Aston, an innovative in-situ semiconductor metrology platform with an integrated plasma ionisation source.

It is a major evolution in metrology for semiconductor production processes, facilitating in-situ molecular process control and enabling existing fabs to run more efficiently, pushing higher output. Developed from the ground up for semiconductor production, it is a robust platform that can supplant multiple legacy tools and offer unprecedented levels of control over a complete set of applications, including lithography, dielectric and conductive etch and deposition, chamber matching, chamber clean, and abatement.

Read Full ArticleDownload resource