Semiconductor Digest | Video Interview With Atonarp's Joe Cestari

November 10, 2021
Pete Singer

Semiconductor Digest editor-in-chief Pete Singer recently interviewed Joe Cestari, Atonarp's GM mass spectrometry.

In the video, Joe explains the advantages of Atonarp’s Aston mini-mass spectrometers over traditional methods of in-situ chamber analysis, such as optical emission spectroscopy (OES) and residual gas analysis (RGA).

Aston enables real time in-situ monitoring of precursors, reactants, and by-products during various process steps, which allows for baseline fingerprinting, chamber clean and process monitoring end point.

The Aston unit features a rugged plasma ionization source and a self-cleaning ReGen mode.

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