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Semiconductor and thin-film solar processes use and create a variety of process gases and particulate material by-products, which must be disposed of in a controlled manner.

This disposal process is known as ‘abatement’, and has multiple challenges. Monitoring exhaust gases from the abatement system to ensure environmental compliance requires high-sensitivity, real-time, in-situ metrology with PPM level accuracy. Further, optimizing abatement requires that waste process gases be measured for the concentration of pollutants entering the abatement system.

Many abatement systems are run 'open-loop', resulting in high levels of natural gas and nitrogen consumption. Typically, no record is kept of proof of abatement.

Using Atonarp's Aston Plasma mass spectrometer enables in-situ, optimized control of the abatement burn process, and creates a data log for compliance. Aston Plasma is uniquely capable of withstanding harsh conditions, and can provide sensitivity down to PPB levels.


Learn more about Aston and download our Application Brief below for more details on how Aston supports efficient abatement monitoring and exhaust gas environmental compliance.